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激光塵埃粒子計數器，六粒徑通道，半導體等工業潔淨檢測

发布日期：2025-06-30 13:36:47 作者：揚塵檢測儀來源：揚塵監測系統浏覽量：594

激光塵埃粒子計數器的工作原理是光散射現象。當空氣中的微粒在激光束的照射下，會發生散射，散射光的強度與微粒的表面積成正比，可以推斷出微粒的大小和數量。通過內置的采樣泵抽取待測氣體，使氣體以規定的流量通過激光頭。氣體中的塵埃粒子散射激光信號，這些散射光被光學傳感器接收並轉化爲電脈沖信號。隨後，這些脈沖信號經過放大和數字信號處理，與標准粒子信號進行比較，最終將結果以粒子數量和粒徑分布的形式顯示出來。

六粒径通道的激光尘埃粒子计数器，能够一次采样同时测得 0.3μm、0.5μm、1.0μm、3.0μm、5.0μm、10.0μm 这六个粒径通道的尘埃粒子数，实时显示各粒径通道粒子的数目及变化情况。

在半导体制造行业，生产过程对环境洁净度要求很严苛。比如在光刻环节，尘埃粒子落在晶圆上，可能导致光刻图案出现偏差，使芯片出现短路、断路等功能性故障，降低产品良率。在 CMP 抛光区，较大粒径如 5.0μm - 10.0μm 的尘埃粒子，可能会在抛光过程中造成晶圆表面的划痕，影响芯片的电学性能和可靠性。而六粒径通道的激光尘埃粒子计数器，能够精准地监测到不同粒径范围的尘埃粒子浓度变化，帮助企业及时发现潜在的污染源。若在某一区域检测到 0.3μm - 1.0μm 粒径的粒子浓度异常升高，企业可排查是否是空气过滤系统中针对微小粒子的过滤层出现了破损；若 5.0μm - 10.0μm 粒径的粒子增多，或许可能是设备的机械运动部件产生了磨损碎屑，需及时进行维护。

在医药工业的无菌药品生产车间，同样需要严格控制尘埃粒子。对于 A 级区，需要重点在线监测≥0.5μm 粒子，动态时其数量需≤3520/m?，静态时≤20/m?。激光尘埃粒子计数器的六粒径通道可全面监测不同粒径粒子，确保生产环境符合标准，保障药品质量安全。

除了半導體和醫藥行業，在光學、精密機械加工等對環境潔淨度有高要求的工業領域，也需要六粒徑通道的激光塵埃粒子計數器。它爲企業提供了全面、精准的潔淨環境檢測數據，助力企業及時采取措施，優化生産環境，提升産品質量與生産效率。

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